Invention Grant
US08729465B2 Vacuum measurement device with ion source mounted 有权
带离子源的真空测量装置

  • Patent Title: Vacuum measurement device with ion source mounted
  • Patent Title (中): 带离子源的真空测量装置
  • Application No.: US13496005
    Application Date: 2010-09-28
  • Publication No.: US08729465B2
    Publication Date: 2014-05-20
  • Inventor: Fumio Watanabe
  • Applicant: Fumio Watanabe
  • Applicant Address: JP Ibaraki
  • Assignee: Vaclab Inc.
  • Current Assignee: Vaclab Inc.
  • Current Assignee Address: JP Ibaraki
  • Agency: Kubotera & Associates, LLC
  • Priority: JP2009-224918 20090929; JP2009-261826 20091117
  • International Application: PCT/JP2010/067317 WO 20100928
  • International Announcement: WO2011/040625 WO 20110407
  • Main IPC: H01J27/20
  • IPC: H01J27/20 H01J49/14 H01J3/26
Vacuum measurement device with ion source mounted
Abstract:
A vacuum measurement device includes a grid (10) and an electron source (20) provided inside a vacuum vessel, and an ion beam (100) extracted outside the grid is captured by an ion collector (40) and is converted into a current signal. The grid (10) is a grid-shaped cylinder, and an ion outlet (11) is opened and elongated in the longitudinal direction along the side surface of the grid (10). The vacuum measurement device includes a primary ion collector (40) capturing specific ions and a secondary ion collector (50) capturing other ions. The gas molecule density of the ion source is obtained from a total current of the primary and secondary ion collectors, and a ratio of the gas molecule density of the specific ions relative to the gas molecule density is obtained from a ratio of the current of the primary ion collector (40) relative to the total current.
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