Invention Grant
US08729493B2 Drawing apparatus, method of manufacturing article, method of manufacturing deflecting apparatus, and method of manufacturing drawing apparatus 有权
制造装置,制造方法,制造偏转装置的方法以及制造绘图装置的方法

  • Patent Title: Drawing apparatus, method of manufacturing article, method of manufacturing deflecting apparatus, and method of manufacturing drawing apparatus
  • Patent Title (中): 制造装置,制造方法,制造偏转装置的方法以及制造绘图装置的方法
  • Application No.: US13294733
    Application Date: 2011-11-11
  • Publication No.: US08729493B2
    Publication Date: 2014-05-20
  • Inventor: Shinji Ohishi
  • Applicant: Shinji Ohishi
  • Applicant Address: JP Tokyo
  • Assignee: Canon Kabushiki Kaisha
  • Current Assignee: Canon Kabushiki Kaisha
  • Current Assignee Address: JP Tokyo
  • Agency: Canon USA, Inc. IP Division
  • Priority: JP2010-259293 20101119
  • Main IPC: G21K5/04
  • IPC: G21K5/04
Drawing apparatus, method of manufacturing article, method of manufacturing deflecting apparatus, and method of manufacturing drawing apparatus
Abstract:
A drawing apparatus includes a plurality of charged particle optical elements that are sequentially passed through by a plurality of charged particle beams and performs drawing on a substrate with the charged particle beams. The apparatus further includes a deflector array which includes a plurality of deflectors disposed for respective one or more charged particle beams, each of which aligning corresponding one or more charged particle beams between two of the plurality of charged particle optical elements, a plurality of devices configured to respectively apply a plurality of potentials to the deflector array, and a connector configured to connect each of a plurality of electrodes included in the deflector array to one of the plurality of devices and connect electrodes, to which an equal potential is applied, to each other. Number of devices included in the plurality of devices is less than number of electrodes included in the deflector array.
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