Invention Grant
- Patent Title: Needle-shaped profile finFET device
- Patent Title (中): 针形轮廓finFET器件
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Application No.: US13595022Application Date: 2012-08-27
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Publication No.: US08729607B2Publication Date: 2014-05-20
- Inventor: Hiroshi Itokawa , Akira Hokazono
- Applicant: Hiroshi Itokawa , Akira Hokazono
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: White & Case LLP
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/78

Abstract:
Structures and methods are presented relating to formation of finFET semiconducting devices. A finFET device is presented comprising fin(s) formed on a substrate, wherein the fin(s) has a needle-shaped profile. The needle-shaped profile, in conjunction with at least a buffer layer or a doped layer, epitaxially formed on the fin(s), facilitates strain to be induced into the fin(s) by the buffer layer or the doped layer. The fin(s) can comprise silicon aligned on a first plane, while at least one of the buffer layer or the doped layer are grown on a second plane, the alignment of the first and second planes are disparate and are selected such that formation of the buffer layer or the doped layer generates a stress in the fin(s). The generated stress results in a strain being induced into the fin(s) channel region, which can improve electron and/or hole mobility in the channel.
Public/Granted literature
- US20140054648A1 NEEDLE-SHAPED PROFILE FINFET DEVICE Public/Granted day:2014-02-27
Information query
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