Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing the same
- Patent Title (中): 半导体存储器件及其制造方法
-
Application No.: US13368054Application Date: 2012-02-07
-
Publication No.: US08729617B2Publication Date: 2014-05-20
- Inventor: Tae Kyun Kim
- Applicant: Tae Kyun Kim
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: William Park & Associates Patent Ltd.
- Priority: KR10-2011-0018167 20110228
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A semiconductor memory device includes: a lower pillar protruding from a substrate in a vertical direction and extending in a first direction by a trench formed in the first direction; an upper pillar protruding on the lower pillar in a second direction perpendicular to the first direction; a buried bit line junction region disposed on one sidewall of the lower pillar; a buried bit line contacting the buried bit line junction region and filling a portion of the trench; an etch stop film disposed on an exposed surface of the buried bit line; a first interlayer dielectric film recessed to expose a portion of an outer side of at least the upper pillar disposed on the etch stop film; a second interlayer dielectric film disposed on the first interlayer dielectric film; and a gate surrounding the exposed outer side of the upper pillar and crossing the buried bit line.
Public/Granted literature
- US20120217570A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-08-30
Information query
IPC分类: