Invention Grant
- Patent Title: Nonvolatile semiconductor memory device
- Patent Title (中): 非易失性半导体存储器件
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Application No.: US13423464Application Date: 2012-03-19
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Publication No.: US08729623B2Publication Date: 2014-05-20
- Inventor: Tomo Ohsawa , Yosuke Komori
- Applicant: Tomo Ohsawa , Yosuke Komori
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-208205 20110922
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
According to one embodiment, a nonvolatile semiconductor memory device includes: a stacked body including a plurality of electrode layers and a plurality of insulating layers, which are alternately stacked, and diffusion suppressing layers each provided between each of the plurality of electrode layers and each of the plurality of insulating layers; and a memory film provided on a side wall of a hole penetrating the stacked body in a stacking direction. Each of the plurality of electrode layers is a first semiconductor layer containing a first impurity element. The diffusion suppressing layer is a second semiconductor layer containing a second impurity element which is different from the first impurity element. The diffusion suppressing layer is a film having an effect of suppressing diffusion of the first impurity element.
Public/Granted literature
- US20130075742A1 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2013-03-28
Information query
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