Invention Grant
- Patent Title: Enhanced HVPMOS
- Patent Title (中): 增强HVPMOS
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Application No.: US13539033Application Date: 2012-06-29
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Publication No.: US08729629B2Publication Date: 2014-05-20
- Inventor: Willem-Jan Toren , Bruno Villard , Elsa Hugonnard-Bruyere , Gaetan Toulon , Frederic Morancho , Ignasi Cortes Mayol , Thierry Pedron
- Applicant: Willem-Jan Toren , Bruno Villard , Elsa Hugonnard-Bruyere , Gaetan Toulon , Frederic Morancho , Ignasi Cortes Mayol , Thierry Pedron
- Applicant Address: FR Rousset Cedez FR Paris Cedex
- Assignee: Atmel Rousset S.A.S.,Laas-CNRS
- Current Assignee: Atmel Rousset S.A.S.,Laas-CNRS
- Current Assignee Address: FR Rousset Cedez FR Paris Cedex
- Agency: Fish & Richardson P.C.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/336

Abstract:
A p-channel LDMOS device with a controlled n-type buried layer (NBL) is disclosed. A Shallow Trench Isolation (STI) oxidation is defined, partially or totally covering the drift region length. The NBL layer, which can be defined with the p-well mask, connects to the n-well diffusion, thus providing an evacuation path for electrons generated by impact ionization. High immunity to the Kirk effect is also achieved, resulting in a significantly improved safe-operating-area (SOA). The addition of the NBL deep inside the drift region supports a space-charge depletion region which increases the RESURF effectiveness, thus improving BV. An optimum NBL implanted dose can be set to ensure fully compensated charge balance among n and p doping in the drift region (charge balance conditions). The p-well implanted dose can be further increased to maintain a charge balance, which leads to an Rdson reduction.
Public/Granted literature
- US20120267717A1 ENHANCED HVPMOS Public/Granted day:2012-10-25
Information query
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