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US08729779B2 Wide bandwidth slanted-finger contour-mode piezoelectric devices 有权
宽带宽倾斜轮廓模式压电器件

Wide bandwidth slanted-finger contour-mode piezoelectric devices
Abstract:
Contour-mode piezoelectric devices and methods of forming contour mode piezoelectric devices. The contour mode piezoelectric device includes a piezoelectric film having first and second surfaces and suspended so that it is spaced away from a substrate. The contour mode piezoelectric device also includes first and second patterned electrodes respectively disposed on the first and second surfaces of the piezoelectric film, at least one of the first and second patterned electrodes having variable width along a length thereof.
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