Invention Grant
- Patent Title: Wide bandwidth slanted-finger contour-mode piezoelectric devices
- Patent Title (中): 宽带宽倾斜轮廓模式压电器件
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Application No.: US13263194Application Date: 2010-04-09
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Publication No.: US08729779B2Publication Date: 2014-05-20
- Inventor: Carlos R. Perez , Gianluca Piazza
- Applicant: Carlos R. Perez , Gianluca Piazza
- Applicant Address: US PA Philadelphia
- Assignee: The Trustees of the University of Pennsylvania
- Current Assignee: The Trustees of the University of Pennsylvania
- Current Assignee Address: US PA Philadelphia
- Agency: RatnerPrestia
- International Application: PCT/US2010/030506 WO 20100409
- International Announcement: WO2010/138243 WO 20101202
- Main IPC: H01L41/053
- IPC: H01L41/053

Abstract:
Contour-mode piezoelectric devices and methods of forming contour mode piezoelectric devices. The contour mode piezoelectric device includes a piezoelectric film having first and second surfaces and suspended so that it is spaced away from a substrate. The contour mode piezoelectric device also includes first and second patterned electrodes respectively disposed on the first and second surfaces of the piezoelectric film, at least one of the first and second patterned electrodes having variable width along a length thereof.
Public/Granted literature
- US20120139665A1 WIDE BANDWIDTH SLANTED-FINGER CONTOUR-MODE PIEZOELECTRIC DEVICES Public/Granted day:2012-06-07
Information query
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