Invention Grant
US08730471B2 DUV-UV band spectroscopic optical system and spectrometer using same 有权
DUV-UV光谱分光光学系统和光谱仪

  • Patent Title: DUV-UV band spectroscopic optical system and spectrometer using same
  • Patent Title (中): DUV-UV光谱分光光学系统和光谱仪
  • Application No.: US13145942
    Application Date: 2009-12-17
  • Publication No.: US08730471B2
    Publication Date: 2014-05-20
  • Inventor: Keiko OkaYasuhiro Yoshitake
  • Applicant: Keiko OkaYasuhiro Yoshitake
  • Applicant Address: JP Tokyo
  • Assignee: Hitachi, Ltd.
  • Current Assignee: Hitachi, Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: McDermott Will & Emery LLP
  • Priority: JP2009-044231 20090226
  • International Application: PCT/JP2009/006963 WO 20091217
  • International Announcement: WO2010/097880 WO 20100902
  • Main IPC: G01J3/28
  • IPC: G01J3/28
DUV-UV band spectroscopic optical system and spectrometer using same
Abstract:
Disclosed are a spectroscopic optical system and a spectrometer both enabling vertical illumination by means of an optical system using only refractive lenses and enabling wide-band color correction in the DUV-UV (190 to 400 nm) range. The spectroscopic optical system and spectrometer each comprise a light source (100), a folding mirror (110), a field stop (120), an object-side focusing lens system (130) for focusing light onto a sample, an image-side focusing lens (140) disposed on the image forming plane of the object-side focusing lens system, and a spectroscope (150) for dispersing regularly reflected light from the sample. The object-side focusing lens system (130) and the image-side focusing lens system (140) are each a spectroscopic optical system corrected with respect to color in a broad band of wavelength from 190 to 400 nm and configured from only refractive lenses enabling vertical illumination. The working distance (WD) of each lens is set shorter than a predetermined distance, and the doublet interval (D) is set longer than a predetermined distance.
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