Invention Grant
US08730471B2 DUV-UV band spectroscopic optical system and spectrometer using same
有权
DUV-UV光谱分光光学系统和光谱仪
- Patent Title: DUV-UV band spectroscopic optical system and spectrometer using same
- Patent Title (中): DUV-UV光谱分光光学系统和光谱仪
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Application No.: US13145942Application Date: 2009-12-17
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Publication No.: US08730471B2Publication Date: 2014-05-20
- Inventor: Keiko Oka , Yasuhiro Yoshitake
- Applicant: Keiko Oka , Yasuhiro Yoshitake
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2009-044231 20090226
- International Application: PCT/JP2009/006963 WO 20091217
- International Announcement: WO2010/097880 WO 20100902
- Main IPC: G01J3/28
- IPC: G01J3/28

Abstract:
Disclosed are a spectroscopic optical system and a spectrometer both enabling vertical illumination by means of an optical system using only refractive lenses and enabling wide-band color correction in the DUV-UV (190 to 400 nm) range. The spectroscopic optical system and spectrometer each comprise a light source (100), a folding mirror (110), a field stop (120), an object-side focusing lens system (130) for focusing light onto a sample, an image-side focusing lens (140) disposed on the image forming plane of the object-side focusing lens system, and a spectroscope (150) for dispersing regularly reflected light from the sample. The object-side focusing lens system (130) and the image-side focusing lens system (140) are each a spectroscopic optical system corrected with respect to color in a broad band of wavelength from 190 to 400 nm and configured from only refractive lenses enabling vertical illumination. The working distance (WD) of each lens is set shorter than a predetermined distance, and the doublet interval (D) is set longer than a predetermined distance.
Public/Granted literature
- US20110279820A1 DUV-UV BAND SPECTROSCOPIC OPTICAL SYSTEM AND SPECTROMETER USING SAME Public/Granted day:2011-11-17
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