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US08730557B2 Low voltage drive for MEMS ribbon array light modulators 有权
MEMS带状阵列光调制器的低压驱动

Low voltage drive for MEMS ribbon array light modulators
Abstract:
A series bias voltage increases the sensitivity of a MEMS ribbon to control signal voltages. This effect is obtained because of the nonlinear dependence of ribbon deflection on applied voltage. The resulting low-voltage operation of MEMS ribbons makes them more compatible with high speed electronics.
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