Invention Grant
US08732629B2 Method and system for lithography hotspot correction of a post-route layout 有权
路线布局光刻热点校正方法与系统

  • Patent Title: Method and system for lithography hotspot correction of a post-route layout
  • Patent Title (中): 路线布局光刻热点校正方法与系统
  • Application No.: US13503748
    Application Date: 2010-10-28
  • Publication No.: US08732629B2
    Publication Date: 2014-05-20
  • Inventor: Yang-Shan Tong
  • Applicant: Yang-Shan Tong
  • Applicant Address: US CA Mountain View
  • Assignee: Synopsys, Inc.
  • Current Assignee: Synopsys, Inc.
  • Current Assignee Address: US CA Mountain View
  • Agency: Young, Basile, Hanlon & MacFarlane, P.C.
  • Priority: CN200910211373 20091030; CN200910211393 20091030
  • International Application: PCT/IB2010/002760 WO 20101028
  • International Announcement: WO2011/051791 WO 20110505
  • Main IPC: G06F17/50
  • IPC: G06F17/50
Method and system for lithography hotspot correction of a post-route layout
Abstract:
Disclosed herein are correcting methods and devices for lithography hotspots of the post-routing layout, used for correcting lithography hotspots detected in the post-routing layout. At least one two-dimensional pattern of changeable size or position of the number of hotspots in the local area is selected and adjusted, so that the simulation value of the aerial image intensity of various local areas is optimized. The simulation value of the aerial image intensity is derived through calculation with respect to a set of optical simulation model cells that can be determined by the numerical value of distribution of the aerial image intensity of a number of basic two-dimensional patterns. After adjustment, the aerial image intensity of the local area can be calculated with respect to a set of optical simulation model cells, and a number of cells in the simulation model cells are selected to synthesize the two-dimensional pattern after the change.
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