Invention Grant
- Patent Title: Composite sensor and electronic device
- Patent Title (中): 复合传感器和电子装置
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Application No.: US13687575Application Date: 2012-11-28
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Publication No.: US08733169B2Publication Date: 2014-05-27
- Inventor: Masahiro Oshio
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2009-033604 20090217; JP2010-024062 20100205
- Main IPC: G01P1/02
- IPC: G01P1/02

Abstract:
A composite sensor includes: a package including a container and a lid; a plurality of spaces that is partitioned by at least the container and the lid, and has different pressures, the plurality of the spaces including a first space sealed at around an atmospheric pressure and a second space sealed at a depressurized state; an acceleration sensor element disposed in the first space; and a vibration type angular velocity sensor element disposed in the second space. In the sensor, the first space has a volume smaller than a volume of the second space.
Public/Granted literature
- US20130081462A1 COMPOSITE SENSOR AND ELECTRONIC DEVICE Public/Granted day:2013-04-04
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