Invention Grant
- Patent Title: Electrode configurations for piezoelectric actuators
- Patent Title (中): 用于压电执行器的电极配置
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Application No.: US12981089Application Date: 2010-12-29
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Publication No.: US08733272B2Publication Date: 2014-05-27
- Inventor: Deane A. Gardner , Andreas Bibl
- Applicant: Deane A. Gardner , Andreas Bibl
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Fish & Richardson P.C.
- Main IPC: B05B9/04
- IPC: B05B9/04 ; H01L41/08

Abstract:
Fluid ejection apparatuses and processes for making the same are disclosed. An apparatus for ejecting fluid droplets includes a substrate having a plurality of flow paths formed therein, each flow path including a respective pumping chamber and a respective nozzle, and the respective nozzle being configured to eject fluid droplets through a first surface of the substrate in response to actuation of the respective pumping chamber; and an actuation assembly including a drive electrode layer over a second surface of the substrate opposite to the first surface, a piezoelectric layer over the drive electrode layer, and a reference electrode layer over the piezoelectric layer, the drive electrode layer being patterned to define an individually controllable drive electrode over each of two or more pumping chambers in the substrate, and the reference electrode layer including a continuous reference electrode spanning the two or more pumping chambers in the substrate.
Public/Granted literature
- US20120167823A1 ELECTRODE CONFIGURATIONS FOR PIEZOELECTRIC ACTUATORS Public/Granted day:2012-07-05
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