Invention Grant
US08733904B2 Electro-mechanical transducer, method of making the transducer, liquid ejection head including the transducer, and liquid ejection apparatus including the head 有权
机电换能器,制造换能器的方法,包括换能器的液体喷射头和包括头部的液体喷射装置

Electro-mechanical transducer, method of making the transducer, liquid ejection head including the transducer, and liquid ejection apparatus including the head
Abstract:
An electro-mechanical transducer includes a plurality of independent elements. Each of the plurality of independent elements includes one of a substrate and a foundation film, a first electrode of oxide disposed on the one of the substrate and the foundation film, an electro-mechanical transducer film disposed on the first electrode, a second electrode of oxide disposed on the electro-mechanical transducer film, and a third electrode of metal formed on the first electrode as a common electrode conductive to the first electrode and common to at least two of the plurality of independent elements.
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