Invention Grant
- Patent Title: Composite substrate carrier
- Patent Title (中): 复合衬底载体
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Application No.: US13747171Application Date: 2013-01-22
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Publication No.: US08734698B2Publication Date: 2014-05-27
- Inventor: Sanjiv M. Bhatt , Shawn D. Eggum
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Christensen Fonder P.A.
- Main IPC: B29C45/14
- IPC: B29C45/14

Abstract:
A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second different thermoplastic material. One of the operative portion and support portion is overmolded onto the other to form a gapless hermitic interface that securely bonds the portions together. The operative portion may be a transparent window, a portion of a latching mechanism or a wafer contact portion. Preferred embodiments of the invention include wafer carriers with said features, process carriers with said features and a process for manufacturing wafer carriers with said features.
Public/Granted literature
- US20130134624A1 COMPOSITE SUBSTRATE CARRIER Public/Granted day:2013-05-30
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