Invention Grant
- Patent Title: Imprint apparatus and method of manufacturing article
- Patent Title (中): 印刷装置及其制造方法
-
Application No.: US12816881Application Date: 2010-06-16
-
Publication No.: US08734701B2Publication Date: 2014-05-27
- Inventor: Eigo Kawakami
- Applicant: Eigo Kawakami
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2009-143670 20090616
- Main IPC: B28B11/08
- IPC: B28B11/08

Abstract:
An imprint apparatus, which performs an imprint process for forming a pattern of a mold on a resin coated on a substrate, includes an imaging unit configured to image the resin on which the pattern is formed, and a controller configured to control the imprint process. When the pattern is continuously formed on the substrate, the controller compares an image of at least a partial area imaged by the imaging unit and an image of a reference state, which is obtained in advance, and when patterns each having a difference, which falls outside an allowable range, between the images are continuously formed, it determines a transfer error.
Public/Granted literature
- US20100314798A1 IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2010-12-16
Information query