Invention Grant
- Patent Title: Salt and photoresist composition containing the same
- Patent Title (中): 含有其的盐和光致抗蚀剂组合物
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Application No.: US12786738Application Date: 2010-05-25
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Publication No.: US08735044B2Publication Date: 2014-05-27
- Inventor: Koji Ichikawa , Isao Yoshida
- Applicant: Koji Ichikawa , Isao Yoshida
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Chemical Company, Limited
- Current Assignee: Sumitomo Chemical Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2009-129349 20090528
- Main IPC: G03F7/039
- IPC: G03F7/039 ; C07C303/32 ; G03F7/004

Abstract:
A salt represented by the formula (a): wherein Q1 and Q2 each independently represent a fluorine atom etc., X1 represents a single bond etc., X2 represents a single bond etc., Y1 represents a C3-C6 alicyclic hydrocarbon group etc., with the proviso that —X2—Y1 group has one or more fluorine atoms, and Z+ represents an organic counter cation, and a photoresist composition comprising the salt represented by the formula (a) and a resin comprising a structural unit having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid.
Public/Granted literature
- US20100304293A1 SALT AND PHOTORESIST COMPOSITION CONTAINING THE SAME Public/Granted day:2010-12-02
Information query
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