Invention Grant
US08735052B2 Surface modifying material, method of forming resist pattern, and method of forming pattern 有权
表面改性材料,形成抗蚀剂图案的方法和形成图案的方法

Surface modifying material, method of forming resist pattern, and method of forming pattern
Abstract:
A surface modifying material for forming a surface modifying layer provided between a substrate and a resist film, the surface modifying material including an epoxy resin having a weight average molecular weight of 1,000 to 50,000; a method of forming a resist pattern, including: forming a surface modifying layer on a substrate using the surface modifying material, forming a resist film on the substrate, on which the surface modified layer has been formed, using a resist composition, conducting exposure of the resist film, and alkali developing the resist film to form a resist pattern; and a method of forming a pattern, including: etching the substrate, on which a resist pattern has been formed by the method of forming a resist pattern.
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