Invention Grant
US08735052B2 Surface modifying material, method of forming resist pattern, and method of forming pattern
有权
表面改性材料,形成抗蚀剂图案的方法和形成图案的方法
- Patent Title: Surface modifying material, method of forming resist pattern, and method of forming pattern
- Patent Title (中): 表面改性材料,形成抗蚀剂图案的方法和形成图案的方法
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Application No.: US13047404Application Date: 2011-03-14
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Publication No.: US08735052B2Publication Date: 2014-05-27
- Inventor: Isao Hirano , Junichi Tsuchiya
- Applicant: Isao Hirano , Junichi Tsuchiya
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2010-064365 20100319
- Main IPC: G03F7/30
- IPC: G03F7/30

Abstract:
A surface modifying material for forming a surface modifying layer provided between a substrate and a resist film, the surface modifying material including an epoxy resin having a weight average molecular weight of 1,000 to 50,000; a method of forming a resist pattern, including: forming a surface modifying layer on a substrate using the surface modifying material, forming a resist film on the substrate, on which the surface modified layer has been formed, using a resist composition, conducting exposure of the resist film, and alkali developing the resist film to form a resist pattern; and a method of forming a pattern, including: etching the substrate, on which a resist pattern has been formed by the method of forming a resist pattern.
Public/Granted literature
- US20110269076A1 SURFACE MODIFYING MATERIAL, METHOD OF FORMING RESIST PATTERN, AND METHOD OF FORMING PATTERN Public/Granted day:2011-11-03
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