Invention Grant
- Patent Title: Electrode, photoelectric conversion device using the electrode, and manufacturing method thereof
- Patent Title (中): 电极,使用该电极的光电转换装置及其制造方法
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Application No.: US13325166Application Date: 2011-12-14
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Publication No.: US08735213B2Publication Date: 2014-05-27
- Inventor: Yuji Oda , Takashi Hirose , Koichiro Tanaka , Sho Kato , Emi Koezuka
- Applicant: Yuji Oda , Takashi Hirose , Koichiro Tanaka , Sho Kato , Emi Koezuka
- Applicant Address: unknown Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: unknown Kanagawa-ken
- Agency: Nixon Peabody LLP
- Agent Jeffrey L. Costellia
- Priority: JP2010-286810 20101223
- Main IPC: H01L21/28
- IPC: H01L21/28

Abstract:
A minute electrode, a photoelectric conversion device including the minute electrode, and manufacturing methods thereof are provided. A plurality of parallel groove portions and a region sandwiched between the groove portions are formed in a substrate, and a conductive resin is supplied to the groove portions and the region and is fixed, whereby the groove portions are filled with the conductive resin and the region is covered with the conductive resin. The supplied conductive resin is not expanded outward, and the electrode with a designed width can be formed. Part of the electrode is formed over the region sandwiched between the groove portions, thus, the area of a cross section in the short axis direction can be large, and a low resistance in the long axis direction can be obtained.
Public/Granted literature
- US20120161130A1 ELECTRODE, PHOTOELECTRIC CONVERSION DEVICE USING THE ELECTRODE, AND MANUFACTURING METHOD THEREOF Public/Granted day:2012-06-28
Information query
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