Invention Grant
US08735238B2 Method of fabricating a semiconductor device including high voltage and low voltage MOS devices
有权
制造包括高电压和低电压MOS器件的半导体器件的方法
- Patent Title: Method of fabricating a semiconductor device including high voltage and low voltage MOS devices
- Patent Title (中): 制造包括高电压和低电压MOS器件的半导体器件的方法
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Application No.: US13039525Application Date: 2011-03-03
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Publication No.: US08735238B2Publication Date: 2014-05-27
- Inventor: ChanSam Chang , Shigenobu Maeda , HeonJong Shin , ChangBong Oh
- Applicant: ChanSam Chang , Shigenobu Maeda , HeonJong Shin , ChangBong Oh
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2005-0127042 20051221
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
Methods and devices for forming both high-voltage and low-voltage transistors on a common substrate using a reduced number of processing steps are disclosed. An exemplary method includes forming at least a first high-voltage transistor well and a first low-voltage transistor well on a common substrate separated by an isolation structure extending a first depth into the substrate, using a first mask and first implantation process to simultaneously implant a doping material of a first conductivity type into a channel region of the low-voltage transistor well and a drain region for the high-voltage transistor well.
Public/Granted literature
- US20110151642A1 SEMICONDUCTOR DEVICE INCLUDING HIGH VOLTAGE AND LOW VOLTAGE MOS DEVICES Public/Granted day:2011-06-23
Information query
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