Invention Grant
- Patent Title: Methods for producing an ultrathin semiconductor circuit
- Patent Title (中): 用于制造超薄半导体电路的方法
-
Application No.: US12877577Application Date: 2010-09-08
-
Publication No.: US08735277B2Publication Date: 2014-05-27
- Inventor: Dirk Mueller , Manfred Schneegans , Sokratis Sgouridis
- Applicant: Dirk Mueller , Manfred Schneegans , Sokratis Sgouridis
- Applicant Address: DE Neubiburg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiburg
- Agency: Slater & Matsil, L.L.P.
- Priority: DE10355508 20031127
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/485

Abstract:
The invention relates to an ultrathin semiconductor circuit having contact bumps and to a corresponding production method. The semiconductor circuit includes a bump supporting layer having a supporting layer thickness and having a supporting layer opening for uncovering a contact layer element being formed on the surface of a semiconductor circuit. An electrode layer is situated on the surface of the contact layer element within the opening of the bump supporting layer, on which electrode layer is formed a bump metallization for realizing the contact bump. On account of the bump supporting layer, a thickness of the semiconductor circuit can be thinned to well below 300 micrometers, with the wafer reliably being prevented from breaking. Furthermore, the moisture barrier properties of the semiconductor circuit are thereby improved.
Public/Granted literature
- US20100330744A1 ULTRATHIN SEMICONDUCTOR CIRCUIT HAVING CONTACT BUMPS AND CORRESPONDING PRODUCTION METHOD Public/Granted day:2010-12-30
Information query
IPC分类: