Invention Grant
- Patent Title: Semiconductor memory device
- Patent Title (中): 半导体存储器件
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Application No.: US12987109Application Date: 2011-01-08
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Publication No.: US08735865B2Publication Date: 2014-05-27
- Inventor: Hiroyuki Minemura , Yumiko Anzai , Takahiro Morikawa , Toshimichi Shintani , Yoshitaka Sasago
- Applicant: Hiroyuki Minemura , Yumiko Anzai , Takahiro Morikawa , Toshimichi Shintani , Yoshitaka Sasago
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2010-067204 20100324
- Main IPC: H01L29/02
- IPC: H01L29/02 ; H01L29/06 ; G11C11/00

Abstract:
For decreasing a recording current and suppressing a cross erase simultaneously, a three-dimensional phase-change memory for attaining higher sensitivity and higher reliability by the provision of a chalcogenide type interface layer is provided, in which an electric resistivity, a thermal conductivity, and a melting point of the material of the interface layer are selected appropriately, thereby improving the current concentration to the phase-change material and thermal and material insulation property with Si channel upon writing.
Public/Granted literature
- US20110235408A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2011-09-29
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