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US08735869B2 Strained gate-all-around semiconductor devices formed on globally or locally isolated substrates 有权
形成在全局或局部隔离的基板上的应变门全面半导体器件

Strained gate-all-around semiconductor devices formed on globally or locally isolated substrates
Abstract:
Strained gate-all-around semiconductor devices formed on globally or locally isolated substrates are described. For example, a semiconductor device includes a semiconductor substrate. An insulating structure is disposed above the semiconductor substrate. A three-dimensional channel region is disposed above the insulating structure. Source and drain regions are disposed on either side of the three-dimensional channel region and on an epitaxial seed layer. The epitaxial seed layer is composed of a semiconductor material different from the three-dimensional channel region and disposed on the insulating structure. A gate electrode stack surrounds the three-dimensional channel region with a portion disposed on the insulating structure and laterally adjacent to the epitaxial seed layer.
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