Invention Grant
US08735869B2 Strained gate-all-around semiconductor devices formed on globally or locally isolated substrates
有权
形成在全局或局部隔离的基板上的应变门全面半导体器件
- Patent Title: Strained gate-all-around semiconductor devices formed on globally or locally isolated substrates
- Patent Title (中): 形成在全局或局部隔离的基板上的应变门全面半导体器件
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Application No.: US13629135Application Date: 2012-09-27
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Publication No.: US08735869B2Publication Date: 2014-05-27
- Inventor: Annalisa Cappellani , Abhijit Jayant Pethe , Tahir Ghani , Harry Gomez
- Applicant: Annalisa Cappellani , Abhijit Jayant Pethe , Tahir Ghani , Harry Gomez
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L29/06
- IPC: H01L29/06

Abstract:
Strained gate-all-around semiconductor devices formed on globally or locally isolated substrates are described. For example, a semiconductor device includes a semiconductor substrate. An insulating structure is disposed above the semiconductor substrate. A three-dimensional channel region is disposed above the insulating structure. Source and drain regions are disposed on either side of the three-dimensional channel region and on an epitaxial seed layer. The epitaxial seed layer is composed of a semiconductor material different from the three-dimensional channel region and disposed on the insulating structure. A gate electrode stack surrounds the three-dimensional channel region with a portion disposed on the insulating structure and laterally adjacent to the epitaxial seed layer.
Public/Granted literature
- US20140084342A1 STRAINED GATE-ALL-AROUND SEMICONDUCTOR DEVICES FORMED ON GLOBALLY OR LOCALLY ISOLATED SUBSTRATES Public/Granted day:2014-03-27
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