Invention Grant
- Patent Title: Oxide thin film transistor and method of fabricating the same
- Patent Title (中): 氧化物薄膜晶体管及其制造方法
-
Application No.: US13324751Application Date: 2011-12-13
-
Publication No.: US08735883B2Publication Date: 2014-05-27
- Inventor: Dae-Hwan Kim , Byung-Kook Choi , Sul Lee , Hoon Yim
- Applicant: Dae-Hwan Kim , Byung-Kook Choi , Sul Lee , Hoon Yim
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: KR10-2010-0127171 20101213
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/786 ; H01L27/12

Abstract:
A method for fabricating an oxide thin film transistor includes sequentially forming a gate insulating film, an oxide semiconductor layer, and a first insulating layer; selectively patterning the oxide semiconductor layer and the first insulating layer to form an active layer and an insulating layer pattern on the gate electrode; forming a second insulating layer on the substrate having the active layer and the insulating layer pattern formed thereon; and selectively patterning the insulating layer pattern and the second insulating layer to form first and second etch stoppers on the active layer. The oxide semiconductor layer may be a ternary system or quaternary system oxide semiconductor comprising a combination of AxByCzO (A, B, C=Zn, Cd, Ga, In, Sn, Hf, Zr; x, y, z≧0).
Public/Granted literature
- US20120146017A1 OXIDE THIN FILM TRANSISTOR AND METHOD OF FABRICATING THE SAME Public/Granted day:2012-06-14
Information query
IPC分类: