Invention Grant
- Patent Title: High ultraviolet light absorbance silicon oxynitride film for improved flash memory device performance
- Patent Title (中): 高紫外光吸收氧氮化硅薄膜,用于改善闪存器件性能
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Application No.: US12313134Application Date: 2008-11-17
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Publication No.: US08735960B2Publication Date: 2014-05-27
- Inventor: Minh Q. Tran , Minh-Van Ngo , Alexander H. Nickel , Sung Jin Kim , Simon Chan , Ning Cheng
- Applicant: Minh Q. Tran , Minh-Van Ngo , Alexander H. Nickel , Sung Jin Kim , Simon Chan , Ning Cheng
- Applicant Address: US CA Sunnyvale
- Assignee: Spansion LLC
- Current Assignee: Spansion LLC
- Current Assignee Address: US CA Sunnyvale
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
An ultraviolet light absorbent silicon oxynitride layer overlies a memory cell including a pair of source/drains, a gate insulator, a floating gate, a dielectric layer, and a control gate. A conductor is disposed through the silicon oxynitride layer for electrical connection to the control gate, and another conductor is disposed through the silicon oxynitride layer for electrical connection to a source/drain.
Public/Granted literature
- US20100123178A1 High ultraviolet light absorbance silicon oxynitride film for improved flash memory device performance Public/Granted day:2010-05-20
Information query
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