Invention Grant
- Patent Title: Nonvolatile semiconductor memory device and method for manufacturing same
- Patent Title (中): 非易失性半导体存储器件及其制造方法
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Application No.: US13421471Application Date: 2012-03-15
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Publication No.: US08735965B2Publication Date: 2014-05-27
- Inventor: Hanae Ishihara , Mitsuru Sato , Toru Matsuda
- Applicant: Hanae Ishihara , Mitsuru Sato , Toru Matsuda
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-202402 20110915
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
According to one embodiment, a nonvolatile semiconductor memory device includes a substrate, an electrode layer provided above the substrate, a first insulating layer provided on the electrode layer, a stacked body provided on the insulating layer, a memory film, a channel body layer, a channel body connecting portion and a second insulating layer. The stacked body has a plurality of conductive layers and a plurality of insulating film alternately stacked on each other. The memory film is provided on a sidewall of each of a pair of holes penetrating the stacked body in a direction of stacking the stacked body. The channel body layer is provided on an inner side of the memory film in each of the pair of the holes.
Public/Granted literature
- US20130069139A1 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2013-03-21
Information query
IPC分类: