Invention Grant
US08735984B2 FinFET with novel body contact for multiple Vt applications
有权
FinFET具有新的身体接触,适用于多种Vt应用
- Patent Title: FinFET with novel body contact for multiple Vt applications
- Patent Title (中): FinFET具有新的身体接触,适用于多种Vt应用
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Application No.: US12803776Application Date: 2010-07-06
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Publication No.: US08735984B2Publication Date: 2014-05-27
- Inventor: Chunshan Yin , Kian Ming Tan , Jae Gon Lee
- Applicant: Chunshan Yin , Kian Ming Tan , Jae Gon Lee
- Applicant Address: SG Singapore
- Assignee: Globalfoundries Singapore PTE, Ltd.
- Current Assignee: Globalfoundries Singapore PTE, Ltd.
- Current Assignee Address: SG Singapore
- Agent Robert D. McCutcheon
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L27/12

Abstract:
FinFET devices are formed with body contact structures enabling the fabrication of such devices having different gate threshold voltages (Vt). A body contact layer is formed to contact the gate electrode (contact) enabling a forward body bias and a reduction in Vt. Two example methods of fabrication (and resulting structures) are provided. In one method, the gate electrode (silicon-based) and body contact layer (silicon) are connected by growing epitaxy which merges the two structures forming electrical contact. In another method, a via is formed that intersects with the gate electrode (suitable conductive material) and body contact layer and is filled with conductive material to electrically connect the two structures. As a result, various FinFETs with different Vt can be fabricated for different applications.
Public/Granted literature
- US20120007180A1 FinFET with novel body contact for multiple Vt applications Public/Granted day:2012-01-12
Information query
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