Invention Grant
- Patent Title: Electrical-free dummy gate
- Patent Title (中): 无电气虚拟门
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Application No.: US13431072Application Date: 2012-03-27
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Publication No.: US08735994B2Publication Date: 2014-05-27
- Inventor: Chia-Chu Liu , Kuei Shun Chen , Chiang Mu-Chi
- Applicant: Chia-Chu Liu , Kuei Shun Chen , Chiang Mu-Chi
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/088
- IPC: H01L27/088

Abstract:
The present disclosure provides a semiconductor device. The semiconductor device includes an electrical-free dummy gate formed over a substrate. The dummy gate has an elongate shape and is oriented along a first direction. The semiconductor device includes a first functional gate formed over the substrate. The first functional gate has an elongate shape and is oriented along the first direction. The first functional gate is separated from the dummy gate in a second direction perpendicular to the first direction. A first conductive contact is formed on the first functional gate. The semiconductor device includes a second functional gate formed over the substrate. The second functional gate has an elongate shape and is oriented along the first direction. The second functional gate is aligned with and physically separated from the dummy gate in the first direction. A second conductive contact is formed on the second functional gate.
Public/Granted literature
- US20130256809A1 ELECTRICAL-FREE DUMMY GATE Public/Granted day:2013-10-03
Information query
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