Invention Grant
US08736262B2 Integrated magnetic sensor for detecting vertical magnetic fields and manufacturing process thereof 有权
用于检测垂直磁场的集成磁传感器及其制造工艺

Integrated magnetic sensor for detecting vertical magnetic fields and manufacturing process thereof
Abstract:
An integrated magnetic sensor formed in a body including a substrate of semiconductor material, which integrates a Hall cell. A trench is formed in the body, for example, on the back of the substrate, and is delimited by lateral surface portions that extend in a direction transverse to the main face of the body. The trench has a depth in a direction perpendicular to the main face that is much greater than its width in a direction parallel to the main face of the body, between the lateral surface portions. A concentrator made of ferromagnetic material is formed within the trench and is constituted by two ferromagnetic regions, which are set at a distance apart from one another and extend along the lateral surface portions of the trench towards the first Hall cell.
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