Invention Grant
- Patent Title: Integrated magnetic sensor for detecting vertical magnetic fields and manufacturing process thereof
- Patent Title (中): 用于检测垂直磁场的集成磁传感器及其制造工艺
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Application No.: US13021573Application Date: 2011-02-04
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Publication No.: US08736262B2Publication Date: 2014-05-27
- Inventor: Dario Paci , Caterina Riva , Marco Morelli
- Applicant: Dario Paci , Caterina Riva , Marco Morelli
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2010A000083 20100205
- Main IPC: G01R33/07
- IPC: G01R33/07

Abstract:
An integrated magnetic sensor formed in a body including a substrate of semiconductor material, which integrates a Hall cell. A trench is formed in the body, for example, on the back of the substrate, and is delimited by lateral surface portions that extend in a direction transverse to the main face of the body. The trench has a depth in a direction perpendicular to the main face that is much greater than its width in a direction parallel to the main face of the body, between the lateral surface portions. A concentrator made of ferromagnetic material is formed within the trench and is constituted by two ferromagnetic regions, which are set at a distance apart from one another and extend along the lateral surface portions of the trench towards the first Hall cell.
Public/Granted literature
- US20110193556A1 INTEGRATED MAGNETIC SENSOR FOR DETECTING VERTICAL MAGNETIC FIELDS AND MANUFACTURING PROCESS THEREOF Public/Granted day:2011-08-11
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