Invention Grant
- Patent Title: Probe card and inspection apparatus
- Patent Title (中): 探头卡和检测仪器
-
Application No.: US12788874Application Date: 2010-05-27
-
Publication No.: US08736292B2Publication Date: 2014-05-27
- Inventor: Tatsuo Ishigaki , Katsuji Hoshi , Akihisa Akahira
- Applicant: Tatsuo Ishigaki , Katsuji Hoshi , Akihisa Akahira
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Nihon Micronics
- Current Assignee: Kabushiki Kaisha Nihon Micronics
- Current Assignee Address: JP Tokyo
- Agency: Bacon & Thomas, PLLC
- Priority: JP2009-153892 20090629
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
An automatic switching mechanism is controlled by a probe card independent from a tester without limitation of the number of control signals from the tester. A probe card and an inspection apparatus include probes to be brought into contact with electrodes of inspection targets and a power supply channel electrically connecting the probes to a tester. The automatic switching mechanism divides each of the power supply channels into a plurality of power supply wiring portions, which are respectively connected to the probes; and shuts off the power supply wiring responsive to electrical fluctuation such as overcurrent. An electrical fluctuation detection mechanism detects an electrical fluctuation due to a defective product among the inspection targets. A control mechanism, responsive to detection of an electrical fluctuation, shuts off the power supply wiring portion if the electrical fluctuation is caused by the automatic switching mechanism.
Public/Granted literature
- US20100327898A1 PROBE CARD AND INSPECTION APPARATUS Public/Granted day:2010-12-30
Information query