Invention Grant
US08736677B2 Inspection system 有权
检验系统

Inspection system
Abstract:
An inspection system is provided that can calculate highly accurate data for inspection having a high S/N ratio with high freedom. In order to attain this, an imaging timing is adjusted to synchronize a time for a projected image of an object to move by “m” pixels (“m” is an integer number greater than or equal to 1) in the X-axis direction on imaging elements, with an imaging time interval, and partial image data imaged at the identical inspection position on the object is specified from each unit of two-dimensional image data based on the object appearing deviated by “m” pixels in the X-axis direction in each unit of the two-dimensional image data imaged at each of the imaging timings, and data for inspection in which a noise reducing processing is conducted at the inspection position is produced based on each section of the partial image data.
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