Invention Grant
- Patent Title: Lithographic apparatus, a radiation system, a device manufacturing method and a radiation generating method
- Patent Title (中): 光刻设备,辐射系统,器件制造方法和辐射生成方法
-
Application No.: US13132427Application Date: 2009-10-08
-
Publication No.: US08736806B2Publication Date: 2014-05-27
- Inventor: Olav Waldemar Vladimir Frijns , Johannes Christiaan Leonardus Franken , Kurt Gielissen
- Applicant: Olav Waldemar Vladimir Frijns , Johannes Christiaan Leonardus Franken , Kurt Gielissen
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- International Application: PCT/EP2009/063097 WO 20091008
- International Announcement: WO2010/072429 WO 20100701
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/42 ; G03B27/52 ; G03B27/54 ; G03F7/20

Abstract:
A lithographic apparatus includes a radiation system for providing a beam of radiation from radiation emitted by a radiation source. The radiation system includes a contaminant trap for trapping material emanating from the radiation source. The rotation contaminant trap includes a multiple number of elements extending in a radial direction from a common rotation trap axis and being arranged for allowing contaminant material emanating from the radiation source to deposit during propagation of the radiation beam in the radiation system. The radiation system further includes a contaminant catch for receiving contaminant material particles from the rotation trap elements, the contaminant catch having a constitution, during operation of the radiation, for retaining said contaminant material particles.
Public/Granted literature
Information query