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US08737443B2 Nitride semiconductor laser device and wafer 有权
氮化物半导体激光器件和晶圆

Nitride semiconductor laser device and wafer
Abstract:
A nitride semiconductor laser device is provided herein that is reduced in capacitance to have a better response. The nitride semiconductor laser device includes: an active layer; an upper cladding layer which is stacked above the active layer; a low dielectric constant insulating film which is stacked above the upper cladding layer; and a pad electrode which is stacked above the low dielectric constant insulating film.
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