Invention Grant
- Patent Title: Method of pattern selection for source and mask optimization
- Patent Title (中): 源和掩码优化的图案选择方法
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Application No.: US13505286Application Date: 2010-10-26
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Publication No.: US08739082B2Publication Date: 2014-05-27
- Inventor: Hua-Yu Liu , Luoqi Chen , Hong Chen , Zhi-Pan Li , Jun Ye , Min-Chun Tsai , Youping Zhang , Yen-Wen Lu , Jiangwei Li
- Applicant: Hua-Yu Liu , Luoqi Chen , Hong Chen , Zhi-Pan Li , Jun Ye , Min-Chun Tsai , Youping Zhang , Yen-Wen Lu , Jiangwei Li
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- International Application: PCT/EP2010/066106 WO 20101026
- International Announcement: WO2011/051249 WO 20110505
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
The present invention relates to a method of selecting a subset of patterns from a design, to a method of performing source and mask optimization, and to a computer program product for performing the method of selecting a subset of patterns from a design. According to certain aspects, the present invention enables coverage of the full design while lowering the computation cost by intelligently selecting a subset of patterns from a design in which the design or a modification of the design is configured to be imaged onto a substrate via a lithographic process. The method of selecting the subset of patterns from a design includes identifying a set of patterns from the design related to the predefined representation of the design. By selecting the subset of patterns according to the method, the selected subset of patterns constitutes a similar predefined representation of the design as the set of patterns.
Public/Granted literature
- US20120216156A1 Method of Pattern Selection for Source and Mask Optimization Public/Granted day:2012-08-23
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