Invention Grant
- Patent Title: Method and apparatus of operating a scanning probe microscope
- Patent Title (中): 操作扫描探针显微镜的方法和装置
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Application No.: US12618641Application Date: 2009-11-13
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Publication No.: US08739309B2Publication Date: 2014-05-27
- Inventor: Yan Hu , Shuiqing Hu , Chanmin Su
- Applicant: Yan Hu , Shuiqing Hu , Chanmin Su
- Applicant Address: US CA Santa Barbara
- Assignee: Bruker Nano, Inc.
- Current Assignee: Bruker Nano, Inc.
- Current Assignee Address: US CA Santa Barbara
- Agency: Boyle Fredrickson, S.C.
- Main IPC: G01Q20/00
- IPC: G01Q20/00

Abstract:
An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.
Public/Granted literature
- US20100122385A1 METHOD AND APPARATUS OF OPERATING A SCANNING PROBE MICROSCOPE Public/Granted day:2010-05-13
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