Invention Grant
- Patent Title: Inertial sensor with off-axis spring system
- Patent Title (中): 惯性传感器带离轴弹簧系统
-
Application No.: US13282192Application Date: 2011-10-26
-
Publication No.: US08739627B2Publication Date: 2014-06-03
- Inventor: Gary G. Li , Yizhen Lin , Andrew C. McNeil , Lisa Z. Zhang
- Applicant: Gary G. Li , Yizhen Lin , Andrew C. McNeil , Lisa Z. Zhang
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Agency: Schmeiser, Olsen & Watts LLP
- Agent Lowell W. Gresham; Charlene R. Jacobsen
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
An inertial sensor (20) includes a drive mass (30) configured to undergo oscillatory motion and a sense mass (32) linked to the drive mass (30). On-axis torsion springs (58) are coupled to the sense mass (32), the on-axis torsion springs (58) being co-located with an axis of rotation (22). The inertial sensor (20) further includes an off-axis spring system (60). The off-axis spring system (60) includes off-axis springs (68, 70, 72, 74), each having a connection interface (76) coupled to the sense mass (32) at a location on the sense mass (32) that is displaced away from the axis of rotation (22). Together, the on-axis torsion springs (58) and the off-axis spring system (60) enable the sense mass (32) to oscillate out of plane about the axis of rotation (22) at a sense frequency that substantially matches a drive frequency of the drive mass (30).
Public/Granted literature
- US20130104651A1 INERTIAL SENSOR WITH OFF-AXIS SPRING SYSTEM Public/Granted day:2013-05-02
Information query