Invention Grant
US08739632B2 Pressure sensor structure and associated method of making a pressure sensor 有权
压力传感器结构及其制作压力传感器的相关方法

Pressure sensor structure and associated method of making a pressure sensor
Abstract:
A pressure sensor can include a diaphragm plate of an electrically conductive material, the diaphragm plate including substantially planar opposed first and second surfaces. A layer of a dielectric material can be provided at the first surface of the diaphragm plate along a periphery thereof such that a flexion region of the first surface is substantially free of the dielectric material. The dielectric layer can be configured to engage a fixed structure within a housing to support the flexion region as to enable deflection thereof relative to the fixed structure that changes an electrical characteristic of the pressure sensor in response to application of force at the second surface of the diaphragm plate.
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