Invention Grant
- Patent Title: Confinement of foam delivered by a proximity head
- Patent Title (中): 密封由接近头发送的泡沫
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Application No.: US12324316Application Date: 2008-11-26
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Publication No.: US08739805B2Publication Date: 2014-06-03
- Inventor: Arnold Kholodenko , Cheng-Yu (Sean) Lin , Leon Ginzburg , Mark Mandelboym , Gregory A. Tomasch , Anwar Husain
- Applicant: Arnold Kholodenko , Cheng-Yu (Sean) Lin , Leon Ginzburg , Mark Mandelboym , Gregory A. Tomasch , Anwar Husain
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: B08B3/04
- IPC: B08B3/04

Abstract:
In an example embodiment, a linear wet system includes a carrier and a proximity head in a chamber. The proximity head includes three sections in a linear arrangement. The first section suctions liquid from the upper surface of a semiconductor wafer as the wafer is transported by the carrier under the proximity head. The second section is configured to cause a film (or meniscus) of cleaning foam which is a non-Newtonian fluid to flow onto the upper surface of the wafer. The third section is configured to cause a film of rinsing fluid to flow onto the upper surface of the wafer as the wafer is carried under the proximity head. The third section is defined partially around the second section and up to the first section, so that the third section and the first section create a confinement of the cleaning foam with respect to the chamber.
Public/Granted literature
- US20100126528A1 Confinement of Foam Delivered by a Proximity Head Public/Granted day:2010-05-27
Information query
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