Invention Grant
- Patent Title: Life enhancement of ring assembly in semiconductor manufacturing chambers
- Patent Title (中): 半导体制造室中环组件的寿命提高
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Application No.: US13013772Application Date: 2011-01-25
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Publication No.: US08740206B2Publication Date: 2014-06-03
- Inventor: Sandhya Arun , Prashanth Kodigepalli , Padma Gopalakrishnan , Ashish Bhatnagar , Dan Martin , Christopher Heath John Hossack
- Applicant: Sandhya Arun , Prashanth Kodigepalli , Padma Gopalakrishnan , Ashish Bhatnagar , Dan Martin , Christopher Heath John Hossack
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: B25B1/20
- IPC: B25B1/20 ; B25B1/22 ; B24B1/00 ; B24B29/00

Abstract:
The present invention generally relates to a ring assembly that may be used in an etching or other plasma processing chamber. The ring assembly generally includes an inner ring and an outer ring disposed radially outward of the inner ring. The inner ring will correspond to the location where the majority of erosion occurs during use. This inner ring can be flipped and reused until both sides have eroded beyond their service life. Collectively, the two rings generally have the shape of a single piece ring, but the service life of the ring assembly is longer than a conventional single piece ring.
Public/Granted literature
- US20110180983A1 LIFE ENHANCEMENT OF RING ASSEMBLY IN SEMICONDUCTOR MANUFACTURING CHAMBERS Public/Granted day:2011-07-28
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