Invention Grant
- Patent Title: Method and apparatus for ex-situ lift-out specimen preparation
- Patent Title (中): 用于非原位提取样品制备的方法和装置
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Application No.: US13402708Application Date: 2012-02-22
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Publication No.: US08740209B2Publication Date: 2014-06-03
- Inventor: Lucille A. Giannuzzi
- Applicant: Lucille A. Giannuzzi
- Applicant Address: US FL Fort Myers
- Assignee: Expresslo LLC
- Current Assignee: Expresslo LLC
- Current Assignee Address: US FL Fort Myers
- Agency: Marger, Johnson & McCollom, P.C.
- Main IPC: B23Q3/00
- IPC: B23Q3/00 ; B23Q7/00 ; B29C65/00 ; B31B1/60 ; B32B37/00

Abstract:
A specimen carrier for use with an ex-situ lift-out (EXLO) milling process includes a carrier top surface having at least one specimen support area and at least one aperture formed through the specimen carrier top surface. The aperture includes a first opening having an open wider upper end and a narrower lower end. The first opening is bounded by opposed sidewalls in spaced-apart orientation that are inwardly inclined from the wider upper end to the narrower lower end. The aperture is configured to enable a specimen to sit over the opening and can be wedged between the first opening opposed sidewalls so that a region of interest to be milled is centered about the open end of the opening. Specimens so mounted can then be re-thinned via charged particle instruments such as focused ion beam (FIB) milling, broad beam ion milling, or via laser ablation.
Public/Granted literature
- US20130214468A1 METHOD AND APPARATUS FOR EX-SITU LIFT-OUT SPECIMEN PREPARATION Public/Granted day:2013-08-22
Information query
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