Invention Grant
- Patent Title: Imprint recipe creating device and imprint device
- Patent Title (中): 印刷配方创作装置和印版装置
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Application No.: US13177763Application Date: 2011-07-07
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Publication No.: US08740377B2Publication Date: 2014-06-03
- Inventor: Shinji Mikami , Ryoichi Inanami
- Applicant: Shinji Mikami , Ryoichi Inanami
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2010-194231 20100831
- Main IPC: B41J2/01
- IPC: B41J2/01 ; B41J2/00

Abstract:
Certain embodiments provide an imprint recipe creating device comprising first to fifth creation units. The first creation unit creates inside-standard-shot information by use of filling amount information and residual film thickness information. The second creation unit creates first inside-substrate-surface information by use of shot position information, edge information, and the inside-standard-shot information. The third creation unit creates first correction information by use of unevenness information indicating unevenness in a substrate and unevenness distribution information indicating variations in depth of the unevenness inside the substrate surface. The fourth creation unit creates second correction information by use of post-process information indicating the variations in processing size. The fifth creation unit synthesizes the first inside-substrate-surface information, the first correction information and the second correction information, to create second inside-substrate-surface information.
Public/Granted literature
- US20120050441A1 IMPRINT RECIPE CREATING DEVICE AND IMPRINT DEVICE Public/Granted day:2012-03-01
Information query
IPC分类: