Invention Grant
- Patent Title: Transport device having a deflectable sealing frame
- Patent Title (中): 运输装置具有可偏转的密封框架
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Application No.: US13138714Application Date: 2010-04-23
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Publication No.: US08740537B2Publication Date: 2014-06-03
- Inventor: Michael Reising , Stefan Kempf , Georg Roth
- Applicant: Michael Reising , Stefan Kempf , Georg Roth
- Applicant Address: DE Kahl am Main
- Assignee: Singulus Technologies AG
- Current Assignee: Singulus Technologies AG
- Current Assignee Address: DE Kahl am Main
- Agency: Ohlandt, Greeley, Ruggiero & Perle, LLP
- Priority: DE102009018776 20090424; DE102009037290 20090812
- International Application: PCT/EP2010/055454 WO 20100423
- International Announcement: WO2010/122152 WO 20101028
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
A device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport element (4) transports a substrate (5) in the plane (XY) to a defined working area (2, 3, 22) of a chamber (1). The transport element (4) has a deflectable sealing frame (6) which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame (6) has two opposing sealing surfaces (10, 11) in the Z-direction. By pressing a closure element (16, 21, 24) against a first sealing surface (10, 11) and thus pressing the second sealing surface (11, 10) against a chamber wall (32, 31), the space of the working area (2, 3, 22) of the chamber (1) can be sealed.
Public/Granted literature
- US20120027952A1 TRANSPORT DEVICE HAVING A DEFLECTABLE SEALING FRAME Public/Granted day:2012-02-02
Information query
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