Invention Grant
- Patent Title: Apparatus and method for pumping in an ion optical device
- Patent Title (中): 用于泵送离子光学装置的装置和方法
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Application No.: US11636298Application Date: 2006-12-06
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Publication No.: US08740587B2Publication Date: 2014-06-03
- Inventor: Edward B. McCauley
- Applicant: Edward B. McCauley
- Applicant Address: US CA San Jose
- Assignee: Thermo Finnigan LLC
- Current Assignee: Thermo Finnigan LLC
- Current Assignee Address: US CA San Jose
- Agency: Thermo Fisher Scientific IP Dept.
- Agent Nicholas Cairns; Pamela Lau Kee
- Main IPC: F04D19/02
- IPC: F04D19/02

Abstract:
An apparatus and method for differential pumping of a mass spectrometer or other ion-optical device provides a transverse pressure drop introduced across a face of a primary rotor of a turbomolecular pump by placement of one or more partitions in close proximity to the face of the primary rotor. Thus, two or more regions of space within the vacuum chamber having respective different pressures is achieved with a single pump.
Public/Granted literature
- US20070148020A1 Apparatus and method for pumping in an ion optical device Public/Granted day:2007-06-28
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