Invention Grant
- Patent Title: Multiple inlet vacuum pumps
- Patent Title (中): 多进口真空泵
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Application No.: US13143713Application Date: 2010-01-21
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Publication No.: US08740588B2Publication Date: 2014-06-03
- Inventor: Ian David Stones
- Applicant: Ian David Stones
- Applicant Address: GB
- Assignee: Edwards Limited
- Current Assignee: Edwards Limited
- Current Assignee Address: GB
- Agency: Shumaker & Sieffert, P.A.
- Priority: GB0901872.2 20090206; WOPCT/GB2010/050089 20100121
- International Application: PCT/GB2010/050089 WO 20100121
- International Announcement: WO2010/089579 WO 20100812
- Main IPC: F04B23/04
- IPC: F04B23/04 ; F04D19/04

Abstract:
First and second pump stages provide a flow-path from an inlet to the outlet (30), the flow-path being arranged so that molecules entering the first inlet (26) pass to the outlet through the first (120) and second (122) pump stage, and so that molecules entering the second inlet (28) pass to the outlet through an inter-stage volume (121) and second pump stage (122); wherein the first (120) and second (122) pump stages each comprise a turbo-molecular sub-stage (120a, 122a) and a molecular drag sub-stage (120b, 122b).
Public/Granted literature
- US20110286864A1 MULTIPLE INLET VACUUM PUMPS Public/Granted day:2011-11-24
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