Invention Grant
US08740588B2 Multiple inlet vacuum pumps 有权
多进口真空泵

  • Patent Title: Multiple inlet vacuum pumps
  • Patent Title (中): 多进口真空泵
  • Application No.: US13143713
    Application Date: 2010-01-21
  • Publication No.: US08740588B2
    Publication Date: 2014-06-03
  • Inventor: Ian David Stones
  • Applicant: Ian David Stones
  • Applicant Address: GB
  • Assignee: Edwards Limited
  • Current Assignee: Edwards Limited
  • Current Assignee Address: GB
  • Agency: Shumaker & Sieffert, P.A.
  • Priority: GB0901872.2 20090206; WOPCT/GB2010/050089 20100121
  • International Application: PCT/GB2010/050089 WO 20100121
  • International Announcement: WO2010/089579 WO 20100812
  • Main IPC: F04B23/04
  • IPC: F04B23/04 F04D19/04
Multiple inlet vacuum pumps
Abstract:
First and second pump stages provide a flow-path from an inlet to the outlet (30), the flow-path being arranged so that molecules entering the first inlet (26) pass to the outlet through the first (120) and second (122) pump stage, and so that molecules entering the second inlet (28) pass to the outlet through an inter-stage volume (121) and second pump stage (122); wherein the first (120) and second (122) pump stages each comprise a turbo-molecular sub-stage (120a, 122a) and a molecular drag sub-stage (120b, 122b).
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