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US08740604B2 Imprint apparatus and article manufacturing method 有权
印刷装置及制品制造方法

Imprint apparatus and article manufacturing method
Abstract:
An imprint apparatus for coating a substrate with a resin by a coating mechanism, and curing the resin while pressing at least one of the substrate and a mold against the other, includes a measurement device configured to detect a position of the coating mechanism, a substrate stage configured to hold a substrate, a positioning system configured to position the substrate stage, and a controller configured to control positioning of the substrate stage by the positioning system, based on the measurement result.
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