Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
- Patent Title (中): 印刷装置及制品制造方法
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Application No.: US13008377Application Date: 2011-01-18
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Publication No.: US08740604B2Publication Date: 2014-06-03
- Inventor: Hiroshi Sato
- Applicant: Hiroshi Sato
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-009529 20100119
- Main IPC: B05D3/12
- IPC: B05D3/12 ; B05C9/12

Abstract:
An imprint apparatus for coating a substrate with a resin by a coating mechanism, and curing the resin while pressing at least one of the substrate and a mold against the other, includes a measurement device configured to detect a position of the coating mechanism, a substrate stage configured to hold a substrate, a positioning system configured to position the substrate stage, and a controller configured to control positioning of the substrate stage by the positioning system, based on the measurement result.
Public/Granted literature
- US20110177249A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2011-07-21
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