Invention Grant
US08741538B2 Polymer compound, photoresist composition containing such polymer compound, and method for forming resist pattern 有权
高分子化合物,含有该高分子化合物的光致抗蚀剂组合物,以及形成抗蚀剂图案

Polymer compound, photoresist composition containing such polymer compound, and method for forming resist pattern
Abstract:
A polymer compound that, within a chemically amplified positive resist system, exhibits a significant change in alkali solubility from a state prior to exposure to that following exposure, as well as a photoresist composition that includes such a polymer compound and a method for forming a resist pattern, which are capable of forming fine patterns with a high level of resolution. The polymer compound includes, as an alkali-soluble group (i), a substituent group in which a group selected from amongst alcoholic hydroxyl groups, carboxyl groups, and phenolic hydroxyl groups is protected with an acid dissociable, dissolution inhibiting group (ii) represented by a general formula (1) shown below: [Formula 1] —CH2—O-AO—CH2—]n  (1) (wherein, A represents an organic group of 1 to 20 carbon atoms with a valency of at least n+1, and n represents an integer from 1 to 4).
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