Invention Grant
US08741538B2 Polymer compound, photoresist composition containing such polymer compound, and method for forming resist pattern
有权
高分子化合物,含有该高分子化合物的光致抗蚀剂组合物,以及形成抗蚀剂图案
- Patent Title: Polymer compound, photoresist composition containing such polymer compound, and method for forming resist pattern
- Patent Title (中): 高分子化合物,含有该高分子化合物的光致抗蚀剂组合物,以及形成抗蚀剂图案
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Application No.: US12707462Application Date: 2010-02-17
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Publication No.: US08741538B2Publication Date: 2014-06-03
- Inventor: Toshiyuki Ogata , Syogo Matsumaru , Hideo Hada , Masaaki Yoshida
- Applicant: Toshiyuki Ogata , Syogo Matsumaru , Hideo Hada , Masaaki Yoshida
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2004-117693 20040413; JP2004-181067 20040618; JP2004-181068 20040618
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004

Abstract:
A polymer compound that, within a chemically amplified positive resist system, exhibits a significant change in alkali solubility from a state prior to exposure to that following exposure, as well as a photoresist composition that includes such a polymer compound and a method for forming a resist pattern, which are capable of forming fine patterns with a high level of resolution. The polymer compound includes, as an alkali-soluble group (i), a substituent group in which a group selected from amongst alcoholic hydroxyl groups, carboxyl groups, and phenolic hydroxyl groups is protected with an acid dissociable, dissolution inhibiting group (ii) represented by a general formula (1) shown below: [Formula 1] —CH2—O-AO—CH2—]n (1) (wherein, A represents an organic group of 1 to 20 carbon atoms with a valency of at least n+1, and n represents an integer from 1 to 4).
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