Invention Grant
US08741723B2 Methods of forming self-aligned contacts for a semiconductor device
有权
形成用于半导体器件的自对准触点的方法
- Patent Title: Methods of forming self-aligned contacts for a semiconductor device
- Patent Title (中): 形成用于半导体器件的自对准触点的方法
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Application No.: US13455579Application Date: 2012-04-25
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Publication No.: US08741723B2Publication Date: 2014-06-03
- Inventor: Min-Hwa Chi
- Applicant: Min-Hwa Chi
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/3115
- IPC: H01L21/3115

Abstract:
One illustrative method disclosed herein involves forming gate structures for first and second spaced-apart transistors above a semiconducting substrate, forming an etch stop layer above the substrate and the gate structures, performing at least one angled ion implant process to implant at least one etch-inhibiting species into less than an entirety of the etch stop layer, after performing at least one angled ion implant process, forming a layer of insulating material above the etch stop layer, performing at least one first etching process to define an opening in the layer of insulating material and thereby expose a portion of the etch stop layer, performing at least one etching process on the exposed portion of the etch stop layer to define a contact opening therethrough that exposes a doped region formed in the substrate, and forming a conductive contact in the opening that is conductively coupled to the doped region.
Public/Granted literature
- US20130288471A1 METHODS OF FORMING SELF-ALIGNED CONTACTS FOR A SEMICONDUCTOR DEVICE Public/Granted day:2013-10-31
Information query
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