Invention Grant
- Patent Title: Method for fabricating a semiconductor having a graded pn junction
- Patent Title (中): 具有渐变pn结的半导体的制造方法
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Application No.: US12571037Application Date: 2009-09-30
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Publication No.: US08741750B2Publication Date: 2014-06-03
- Inventor: Frank Hille , Franz Josef Niedernostheide , Hans-Joachim Schulze , Holger Schulze
- Applicant: Frank Hille , Franz Josef Niedernostheide , Hans-Joachim Schulze , Holger Schulze
- Applicant Address: AT Villach
- Assignee: Infineon Technologies Austria AG
- Current Assignee: Infineon Technologies Austria AG
- Current Assignee Address: AT Villach
- Agency: Dicke, Billig & Czaja, PLLC
- Priority: DE102008049664 20080930
- Main IPC: H01L21/26
- IPC: H01L21/26

Abstract:
A method for fabricating a semiconductor body is presented. The semiconductor body includes a p-conducting zone, an n-conducting zone and a pn junction in a depth T1 in the semiconductor body between the p-conducting zone and the n-conducting zone. The method includes providing the semiconductor body, producing the p-doped zone by the diffusion of an impurity that forms an acceptor in a first direction into the semiconductor body, and producing the n-conducting zone by the implantation of protons in the first direction into the semiconductor body into a depth T2>T1 and the subsequent heat treatment of the semiconductor body in order to form hydrogen-induced donors.
Public/Granted literature
- US20100087053A1 METHOD FOR FABRICATING A SEMICONDUCTOR HAVING A GRADED PN JUNCTION Public/Granted day:2010-04-08
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