Invention Grant
- Patent Title: Method for producing an electrical feedthrough in a substrate, and a substrate having an electrical feedthrough
- Patent Title (中): 在基板中制造电馈通的方法,以及具有电馈通的基板
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Application No.: US13659030Application Date: 2012-10-24
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Publication No.: US08741774B2Publication Date: 2014-06-03
- Inventor: Jochen Reinmuth , Yvonne Bergmann
- Applicant: Jochen Reinmuth , Yvonne Bergmann
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102011085084 20111024
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/768 ; H01L23/48

Abstract:
A method for producing an electrical feedthrough in a substrate includes: forming a first printed conductor on a first side of a substrate which electrically connects a first contact area of the substrate on the first side; forming a second printed conductor on a second side of a substrate which electrically connects a second contact area of the substrate on the second side; forming an annular trench in the substrate, a substrate punch being formed which extends from the first contact area to the second contact area; and selectively depositing an electrically conductive layer on an inner surface of the annular trench, the substrate punch being coated with an electrically conductive layer and remaining electrically insulated from the surrounding substrate due to the annular trench.
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