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US08742308B2 Imaging array device structure with separate charge storage capacitor layer 有权
成像阵列器件结构具有独立的电荷存储电容层

Imaging array device structure with separate charge storage capacitor layer
Abstract:
An imaging array comprises a photodetector layer, a readout IC (ROIC) layer, and a charge storage capacitor layer which is distinct from the photodetector and ROIC layers; the layers are electrically interconnected to form the array. The capacitors within the charge storage capacitor layer are preferably micromachined; the charge storage capacitor layer can be an interposer layer or an outer layer.
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