Invention Grant
US08742361B2 Focused charged particle column for operation at different beam energies at a target 有权
用于在目标处的不同射束能量下操作的聚焦带电粒子柱

Focused charged particle column for operation at different beam energies at a target
Abstract:
A charged particle column having improved performance at multiple beam energies. The column employs a four-element objective lens to enable improved beam focusing performance at both high and low beam energies at a target, with differing focus voltage configurations for different beam energies. By changing the voltages applied to the four electrodes of the objective lens, different focusing conditions may be rapidly configured, enabling rapid toggling between optimized imaging and optimized processing of a target.
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